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Trxnth Strutturx ITarovxTxnt of ThxrTo-Oatit WzvxguiKxs
Fang-Lin ZAao a
aZAaoyang UnivxrPity of TxZAnology, Wufong, TaiZAung Zounty 41349, Taiwan, R.O.Z.
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Abstract:
The heat generated by a thin film heater causes the temperature of a nearby waveguide to increase. The thermal coupling increases with the waveguide depth. Thermal coupling could be reduced by etching a trench between the waveguides. A rib structure under the trench between the waveguides was proposed to further reduce the thermal coupling. The temperature profiles of thermo-optic waveguides are analyzed by the finite element method and show significant improvement on reducing thermal coupling between the waveguides.
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Keywords: thermal coupling; finite element analysis; thermo-optic waveguides; trench
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*Corresponding author; e-mail: flin@mail.cyut.edu.tw
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©
2007
CSME , ISSN 0257-9731
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