Study of Force-feedback Tactile Sensor Fabricated by AlN Doped ZnO Piezoelectric Film

CSME 2018/04
Volume 39 No.2 : 207-213

Study of Force-feedback Tactile Sensor Fabricated by AlN Doped ZnO Piezoelectric Film

Kun-Dar Li ^a, Chun-Ping Jen^b, David T.W. Lin^c, Jia Yun Kuo ^c, Yu-Jie Shen ^c, Ashwin Verma ^c, Shih-Chi Chan ^d and Kai-Che Liu ^d
^aDepartment of Materials Science, National University of Tainan, Tainan 70005, Taiwan
^bDepartment of Mechanical Engineering, National Chung Cheng University, Chiayi 62102, Taiwan
^cGraduate Institute of System Engineering, National University of Tainan, Tainan 70005, Taiwan
^dChang Bing Show Chwan Memorial Hospital, Changhua 500, Taiwan

Abstract: In this study, we have developed a flexible AlN doped ZnO tactile sensor. This flexible sensor can be applied on the complex surface of the device. The tactile sensor is fabricated by AlN doped ZnO thin film deposited on the flexible polyimide (PI) substrate or copper substrate. The sol gel method and spin coating method are utilized to prepare the AlN doped ZnO piezoelectric films. We have also investigated the influences of the speed of spin coating on the crystallinity and piezoelectric properties of the thin films. The methods of X ray diffraction and scanning electron microscopy are used to examine the crystallinity and the surface topography of the AlN doped ZnO thin films. In addition, the force feedback analyses are performed to compare the output voltages between the sensors on the PI substrate and copper substrate. The response of force feedback proves the availability of this flexible tactile sensor and its robust piezoelectric properties.

Keywords: Tactile sensor, Sol-gel, Thin film, ZnO, AlN

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