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CSME 2018/12
Volume 39 No.6
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545-554
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Simulation Model Establishment and Experimental Verification for Cutting of Trapezium Groove on Single-Crystal Silicon Nanochannel to Expected Depth and Expected Width
Zone-Ching Lina, Po-Yan Chena and Xin-Ren Fanga
aDepartment of Mechanical Engineering, National Taiwan University of Science and Technology, No.43, Keelung Rd., Sec.4, Da'an Dist., Taipei City 10607, Taiwan
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Abstract:
The paper uses specific down force energy (SDFE) equation and two-pass offset cycle cutting method to further derive the required equations of total offset amount of probe for cutting of trapezium groove on nanochannel to expected depth and expected width, probe offset amount of two adjacent cutting passes, number of cutting passes and upward height value at the bottom. Finally, the paper establishes a method for simulation of cutting of trapezium groove on nanochannel to expected depth and expected width. The paper also uses atomic force microscopy (AFM) to carry out experimental verification of nanocutting. The paper uses the total offset amount of probe to estimate the number of cutting passes on each cutting layer, and then substitutes the probe offset amount of the adjacent mutual cutting passes in the calculation equation of upward height at the bottom of trapezium groove, thus achieving the upward height value at the bottom of trapezium groove The paper also proposes that the upward height value at the bottom should be converged at below the set objective convergence value. If the upward height value at the bottom calculated from the estimated two adjacent cutting passes exceeds the objective convergence value, one more cutting pass should be added until the upward height value at the bottom below the objective convergence value ,then the probe offset amount of the two adjacent cutting passes and the number of cutting passes on the cutting layer are obtained by calculation. In order to prevent the probe from being broken during cutting for multiple times, we set a safety coefficient for the maximum permissible downward force of AFM probe. The maximum downward force under the safety coefficient is just the maximum downward force that the paper permits to use. Finally, experimental verification is employed to prove that the theoretical model and simulation method developed by the paper for cutting of trapezium groove on nanochannel to expected depth and expected width are reasonable.
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Keywords: atomic force microscopy(AFM),silicon substrate, trapezium groove on nanochannel,width, depth
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*Corresponding author; e-mail: zclin@mail.ntust.edu.tw
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©
2018
CSME , ISSN 0257-9731
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