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CSME 2020/02
Volume 41 No.1
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21-28
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Effects of Coatings Thickness on the Structural and Mechanical Performances of High Entropy Alloy Nitride Films
Zhi-Wei Liua, Ching-Been Yangb, Chih-Chung Huc, Jun-Cheng Lind, Chung-Chen Tsaod and Chun-Yao Hsud
aDepartment of Mechanical and Electrical Engineering, Dongguan Polytechnic, Dongguan 523808, China
bDepartment of Mechanical Engineering, Nanya Institute of Technology, Taoyuan, Taiwan
cDepartment of Mechanical Engineering, Ming Chi University of Technology, Taipei, Taiwan
dDepartment of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan, Taiwan
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Abstract:
Multi-element high-entropy alloys systems (more than five elements) are alloy with X (5 < X < 13) principal elements each possess an atomic percentage no more than 35%. This paper determines the coating thickness for the high-entropy alloy (HEAs) nitride films using reactive direct current magnetron sputtering, that are deposited on ceramic insert tools and glass substrates. Using equimolar AlCrNbSiTiV HEA target and Ar plasma and N2 reactive gases. The coated nitride films are characterized using scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDS), transmission electron microscopy (TEM) and a nano-indentation technique. The TEM patterns show that the (AlCrNbSiTiV) N films have a simple face-center-cubic (FCC) structure. The (AlCrNbSiTiV) N films are homogeneous, very compact and adhere perfectly to the substrate. The films are uniform and dense, adhere perfectly to the substrate, the results of the Rockwell indentation test are categorized as HF1. The experimental results show that after cutting, the coated tool has a minimum flank wear of 16.91 μm and a surface roughness Ra of 3.79 μm for a sputtering time of 25 min and a film thickness of 431 nm. When the coating thickness exceeds 431nm the elastic recovery and the hardness of the (AlCrNbSiTiV) N film increases However, further increases in the coating thickness results in a decrease in the cutting qualities.
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Keywords: high entropy alloys, film thickness, cutting performance, nano-indentation, direct current magnetron sputtering
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©
2020
CSME , ISSN 0257-9731
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