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CSME 2021/08
Volume 42 No.4
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341-351
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Establishment and Experimental Verification of Simulation Model of Single-Crystal Silicon Cubic Spline Curve Nanochannel Machining
Xin-Ren Fanga, Jie-Men Hoa and Zone-Ching Linb
aDepartment of Mechanical Engineering, National Taiwan University of Science and Technology, No.43, Keelung Rd., Sec.4, Da'an Dist., Taipei City 10607, Taiwan
bDepartment of Mechanical Engineering, National Taiwan University of Science and Technology, No.43, Keelung Rd., Sec.4, Da'an Dist., Taipei City 10607, Taiwan
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Abstract:
The paper proposes a simulation model of Cubic Spline curve nanochannel machining to the expected depth and expected width. Then the paper uses atomic force microscopy (AFM) equipment to make the experimental verification of machining a nanochannel of a straight-line and a Cubic Spline curve to the expected depth and expected width on single-crystal silicon substrate. The paper innovatively proposes using the control point set by the first Cubic Spline curve, and then uses offset equation and the offset amount acquired by the above way to find the calculation method of the control point of Cubic Spline curve equations of other cutting passes on the same cutting layer. Furthermore, the paper calculates the Cubic Spline curve equations of other cutting passes on the same cutting layer. Since AFM equipment cannot carry out Cubic Spline curve machining, the paper proposes applying the calculation equation of the chord height tolerance of Cubic Spline curve and tiny line segment, and further using straight-line approximate Cubic Spline curve method to calculate the straight line of approximate Cubic Spline curve formed by connection of many tiny straight line segments. Also because of the accuracy of AFM equipment being up to 1nm only, we take integers of different intersection points of tiny line segments to carry out machining. In order to reduce the difference, in times of measurement we take the cross-section at the position of the approximate ideal Cubic Spline curve for measurement. Finally, the simulation results of the simulation model established by the paper, with Cubic Spline curve machining performed to the expected width and expected depth, are compared to the AFM experimental results, proving that the simulation model established by the paper is feasible and acceptable.
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Keywords: atomic force microscopy (AFM), silicon substrate, nanochannel trapezium groove, width, depth, curve
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*Corresponding author; e-mail: zclin@mail.ntust.edu.tw
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©
2021
CSME , ISSN 0257-9731
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