|
CSME 2021/10
Volume 42 No.5
:
439-449
|
|
Estimation Method and Experimental Verification of the Least Cutting Passes for Fabrication of a Nanochannel Trapezium Groove on Single-Crystal Silicon with Changed Downward Force at a Fixed Cutting Depth
Zone-Ching Lina, Shih-Hung Mab and Zhi-Rong Chenb
aDepartment of Mechanical Engineering, National Taiwan University of Science and Technology, No.43, Keelung Rd., Sec.4, Da'an Dist., Taipei City 10607, Taiwan.
bDepartment of Mechanical Engineering, National Taiwan University of Science and Technology, No.43, Keelung Rd., Sec.4, Da'an Dist., Taipei City 10607, Taiwan.
|
Abstract:
Employing the concept of specific down force energy (SDFE), the paper establishes a method to estimate the least cutting passes for optimal step-bystep approximation to objective convergence function of the expected depth of nanochannel trapezium groove. This method is a two cutting passes offset fabrication method. For this method, a fixed downward force is set at the 1st cutting pass on each cutting layer is set to use. At the 2nd cutting pass, downward force is changed to achieve the same cutting depth as the one at the first cutting pass. Through simulated change of offset amount, the protruding height on the bottom of groove is smaller than the set convergence value. Then, regulating the downward force repeatedly can make the protrudingheight on botton of groove meet the range of convergence value being below 0.54nm as set by the paper. When a real AFM machine changes the downward force, additional time and efforts have to be spent on changing the downward force. But this paper, for acquisition of the least fabrication lead time during actual application, applies SDFE theoretical model to further estimate the least cutting passes for reaching the expected depth of nanochannel trapezium groove. This method not only can estimate the least cutting passes, but also can make the number of changes of downward force become the least. Finally, the paper even conducts experiments for verification, proving that the above method can really make the fabrication lead time become the least.
|
|
Keywords: atomic force microscope (AFM), silicon expected depth, nanochannel, least cutting passes
|
Download PDF
|
|
*Corresponding author; e-mail: zclin@mail.ntust.edu.tw
|
©
2021
CSME , ISSN 0257-9731
|