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CSME 2022/08
Volume 43 No.4
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295-306
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Machining Simulation Model of Integration of Two Horizontal Straight-line Connected with Curved and Vertical Straight-line Nanochannel as well as Experimental Verification by Atomic Force Microscopy
Zone-Ching Lin a, Jie-men Ho b and Zhi-Rong Chenb
aOpto-Mechatronics Technology, Center (OMTC)National Taiwan University of Science and Technology, No.43, Keelung Rd., Sec.4, Da'an Dist., Taipei City 10607, Taiwan
bDepartment of Mechanical Engineering, National Taiwan University of Science and Technology, No.43, Keelung Rd., Sec.4, Da'an Dist., Taipei City 10607, Taiwan
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Abstract:
First of all, the paper uses specific downwardforce energy (SDFE) equation and two-pass offsetmachining method to further derive the relevantequations and simulation models. Further, the paperproposes a simulated calculation method of a nearcurve that is formed by connecting multiple tiny linesegments. As to the simulated machining method ofconnecting a vertical straight-line nanochannel withthe middle of two horizontal straight-line nanochannels, the paper suggests a machining method that usesthe shape stacking concept and changes the downwardforce for machining to the expected width andexpected depth. The paper also proposes the methodof applying a smaller downward force to remove the slightly raised edge from the vertical straight-linenanochannel. The paper also mentions the crosssection measurement method and the required straightline equation in the AFM measurement experiment.Finally, the paper compares the measurement resultsobtained in AFM experimental machining with thesimulation results, and proves that the paper’s simulation model as well as the AFM experimentalmachining method are reasonable and acceptable.
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Keywords: curved nanochannel, vertical straight-line nanochannel, atomic force microscopy (AFM), two-pass offset machining method
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*Corresponding author; e-mail: zclin@mail.ntust.edu.tw
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©
2022
CSME , ISSN 0257-9731
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