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CSME 2020/10
Volume 41 No.5
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527-538
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Simulation Model and Equations for Fabrication of Connecting Straight Line Segment with Arc Nanochannel to the Expected Width and Expected Depth and Verification of Atomic Force Microscope Fabrication Experiment
Zone-Ching Lina and Ying-jie Qina
aDepartment of Mechanical Engineering, National Taiwan University of Science and Technology, No.43, Keelung Rd., Sec.4, Da'an Dist., Taipei City 10607, Taiwan
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Abstract:
This paper proposes a simulation model and equation for fabrication of a nanochannel trapezium groove that has straight line segment connected with arc of 14 circle, to the expected width and expected depth, and uses the simulation model to obtain the total offset amount of probe, the number of cutting passes on each cutting layer, the probe offset amount between two cutting passes, equation of protruding height value on the bottom, downward force of each cutting pass on each cutting layer, number of near arc of 14 circle shaped tiny line segments and length of each tiny line segment. After that, the paper conducts atomic force microscopy (AFM) experiment of integrated straight line segment and arc of 14 circle fabrication of nanochannel trapezium groove, with fabrication to the expected width and expected depth. Finally, the fabrication results obtained from AFM experiment are measured, verifying that the simulation model and equation proposed by the paper are feasible and acceptable. The paper also derives a straight line equation required for measurement of the cross-section of the tiny line segments of near arc of 14 circle during measurement, and the method for measurement of cross-section. To sum up, the abovementioned simulation model and equation, and the AFM experiment and measurement method proposed in this paper have academic innovativeness and application value.
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Keywords: Atomic Force Microscopy, arc, offset fabrication method of two cutting passes, expected width, expected depth
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*Corresponding author; e-mail: zclin@mail.ntust.edu.tw
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©
2020
CSME , ISSN 0257-9731
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