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CSME 2025/12
Volume 46 No.6
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609-617
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Numerical Analysis and Experimental Verification of Oxygen Concentration in an Oxygen-Free Oven
Jhen-Syuan Huang a, Cian-Shun Luo b and Chi-Chang Wang c
aAssistant Professor, Department of Mechanical and Computer-Aided Engineering, Feng Chia University, Taichung City, Taiwan
bGraduate Student, Department of Mechanical and Computer-Aided Engineering, Feng Chia University, Taichung City, Taiwan.
cProfessor, Department of Mechanical and Computer-Aided Engineering, Feng Chia University, Taichung City, Taiwan.
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Abstract:
This study investigates the transient variation of oxygen concentration in an oxygen-free oven using two numerical methodologies and experimental validation. A two-dimensional model, based on the finite element method, is developed to analyze velocity fields and oxygen concentration distributions, incorporating convection and diffusion effects. Additionally, a zero-dimensional model is introduced to simplify the prediction of oxygen concentration under convection-dominant conditions. The models are validated against experimental data obtained from a semiconductor processing oven in case of different nitrogen flow rates. The results indicate that both models effectively predict oxygen concentration reduction, with deviations from experimental values remaining within 3.3%. Furthermore, the influence of air permeation is examined, and its significant impact on oxygen concentration dynamics is revealed. These findings provide valuable insights for optimizing oxygen-free oven designs and improving process reliability in industrial applications.
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Keywords: Oxygen-Free Oven, Mass Transfer, Numerical Analysis, Air Permeation.
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©
2025
CSME , ISSN 0257-9731
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